PDMS dry etching for higher integration of cells culture microchambers: Application to Hep G2 cells

2002 International Microprocesses and Nanotechnology Conference, MNC 2002

Volumn , Issue , 2002, Pages 276-277

  Leclerc, E ^a,b   Sakai, Y ^b   Fujii, T ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Dry etching; Microdevices; PDMS

Indexed keywords

CELLS; CYTOLOGY; MICROCHANNELS; NANOTECHNOLOGY; NETWORK LAYERS; PHOTOLITHOGRAPHY; PULSE WIDTH MODULATION;

3D MICROSTRUCTURES; HIGHER INTEGRATION; HUMAN HEPATOCARCINOMA; MICRO-CHAMBERS; MICROCHANNEL NETWORK; MICRODEVICES; MICROFABRICATED; PERFUSION SYSTEM;

DRY ETCHING;

EID: 24944543172     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2002.1178650     Document Type: Conference Paper

References (2)

1. Eric Leclerc, Yasuyuki Sakai, Teruo Fujii, 2002, Three-dimensional network of PDMS (PolyDiMethylSiloxane) for 3T3-L1 fibroblast and Hep G2 cells culture, Proc. mTAS2002 in Nara, Japan, to appear
2. Garra et al, 2001, Dry Etching of Polydimethylsiloxane (PDMS) for Microfluidic Systems, Tenth Canadian Semiconductor Technology Conference, Ottawa, Canada