Fabrication of graphite nano-structures

Wuli Xuebao/Acta Physica Sinica

Volumn 54, Issue 9, 2005, Pages 4251-4255

  Liu, Shou Peng ^a   Zhou, Feng ^a   Jin, Ai Zi ^a   Yang, Hai Fang ^a   Ma, Yong Jun ^a   Li, Hui ^a   Gu, Chang Zhi ^a   Lu, Li ^a   Jiang, Bo ^b   Zheng, Quan Shui ^b   Wang, Sheng ^c   Peng, Lian Mao ^c  

^a INSTITUTE OF PHYSICS   (China)

^b TSINGHUA UNIVERSITY   (China)

^c PEKING UNIVERSITY   (China)

Author keywords

Electron beam lithography; Focused ion beam etching; Highly oriented pyrolytic graphite; Reactive ion etching

Indexed keywords

EID: 24744464988     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)