XPS study of the molecular damage of polyimide precursor monomers deposited by glow discharge-induced sublimation

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 481-485

  Maggioni, G ^a,b   Negro, E ^b   Carturan, S ^a   Quaranta, A ^b   Scandurra, A ^c   Puglisi, O ^d   Della Mea, G ^b  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF TRENTO   (Italy)

^c STMICROELECTRONICS   (Italy)

^d UNIVERSITY OF CATANIA   (Italy)

Author keywords

Organic coating; Plasma; Polyimide

Indexed keywords

DEPOSITION; GLOW DISCHARGES; MOLECULAR STRUCTURE; MONOMERS; ORGANIC COATINGS; PLASMA INTERACTIONS; SUBLIMATION; SURFACES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DAMAGE MECHANISMS; GLOW DISCHARGE INDUCED SUBLIMATION; MOLECULAR DAMAGE;

POLYIMIDES;

COATING;

EID: 24644518945     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.053     Document Type: Article

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