CaTiO3 films sputter-deposited under simultaneous Ti-ion implantation on Ti-substrate

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 1005-1008

  Asami, K ^a   Ohtsu, N ^a   Saito, K ^a   Hanawa, T ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Biomaterials; Calcium titanate; Sputter deposition; Ti+ implantation; Titanium; X ray photoelectron spectroscopy

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; BIOMATERIALS; ION IMPLANTATION; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; TITANIUM; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CALCIUM TITANATE; TITANIUM ION IMPLANTATION;

CALCIUM COMPOUNDS;

SPUTTERING;

EID: 24644516589     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.189     Document Type: Article

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