Selectivity switch concept in Cu chemical mechanical planarization and its implementation on orbital tools

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 2262-2271

  Gotkis, Y ^a  

^a SpeedFam IPEC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644511792     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590903     Document Type: Article

References (3)

1. F. W. Preston, J. Soc. Glass Technol. 11, 214 (1927).
2. R. Carpio, J. Farkas, and R. Jairath, Thin Solid Films 266, 238 (1995).
3. D. Zeidler, Z. Stavreva, M. Plotner, and K. Drescher, Microelectron. Eng. 33, 259 (1997).