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Volumn 5753, Issue II, 2005, Pages 932-938
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Encapsulation of light emitting materials and photo-patterning using β-cyclodextrin
a b |
Author keywords
ArF lithography; Chemically amplified resists; Cyclodextrin; Inclusion; Light emittng; Nanomolecular resists
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Indexed keywords
COMPLEXATION;
EMISSION SPECTROSCOPY;
INCLUSIONS;
LIGHT EMISSION;
MOLECULAR WEIGHT;
OLIGOMERS;
PHOTOLITHOGRAPHY;
REACTION KINETICS;
ARF LITHOGRAPHY;
CHEMICALLY AMPLIFIED RESISTS;
CYCLODEXTRIN;
LIGHT-EMITTING;
NANOMOLECULAR RESISTS;
OPTICAL MATERIALS;
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EID: 24644504711
PISSN: 16057422
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.600269 Document Type: Conference Paper |
Times cited : (1)
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References (5)
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