Determination of layer thickness with μxRF

Applied Surface Science

Volumn 252, Issue 1 SPEC. ISS., 2005, Pages 53-56

  Vogt, Carla ^a   Dargel, Rainer ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Layer thickness; MicroXRF; Thin films; TiN

Indexed keywords

FLUORESCENCE; NONDESTRUCTIVE EXAMINATION; SURFACE ROUGHNESS;

FLUORESCENCE RADIATION; INCIDENT BEAMS; LAYER THICKNESS; MICROXRF;

THIN FILMS;

EID: 24644503146     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.02.014     Document Type: Conference Paper

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