A combined SNMS and EFTEM/EELS study on focused ion beam prepared vanadium nitride thin films

Applied Surface Science

Volumn 252, Issue 1 SPEC. ISS., 2005, Pages 66-76

  Kothleitner, Gerald ^a   Rogers, M ^a   Berendes, A ^b   Bock, W ^c   Kolbesen, B O ^c  

^a GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

^b GOETHE UNIVERSITY   (Germany)

^c Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

Focused ion beam preparation (FIB); Rapid thermal processing (RTP); Secondary neutral mass spectrometry (SNMS); STEM EELS; TEM gun monochromator; Vanadium nitride films

Indexed keywords

CRYSTALLOGRAPHY; HIGH RESOLUTION ELECTRON MICROSCOPY; SPECTROMETERS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VANADIUM COMPOUNDS;

RAPID THERMAL PROCESSING (RTP); SECONDARY NEURAL MASS SPECTROMETRY (SNMS); TEM GUN MONOCHROMATORS; VANADIUM NITRIDE FILMS;

ION BEAMS;

EID: 24644452062     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.02.013     Document Type: Conference Paper

References (33)

1. J.C. Vickerman Surface Analysis - The Principal Techniques 1997 John Wiley & Sons Ltd. Chichester, England
2. E.C. Kirk, D.A. Williams, and A. Ahmed Inst. Phys. Conf. Ser. 100 1989 502
3. D.P. Basile, R. Boylan, B. Baker, K. Hayes, and D. Soza Mater. Res. Soc. Symp. Proc. 254 1991 23
4. L.A. Giannuzzi, J.L. Drown, S.R. Brown, R.B. Irwin, and R.B. Stevie Mater. Res. Soc. Symp. Proc. 480 1997 19
5. Y. Ritz, H. Stegmann, H.-J. Engelmann, and E. Zschech Prakt. Met. 41 4 2004 180
6. C. Burkhardt, and W. Nisch Prakt. Met. 41 4 2004 190
7. Energy-filtering transmission electron microscopy L. Reimer Springer Series in Optical Sciences vol. 71 1993 Springer Verlag New York
8. F. Hofer, P. Warbichler, and W. Grogger Ultramicroscopy 59 1995 15
9. F. Hofer, W. Grogger, G. Kothleitner, and P. Warbichler Ultramicroscopy 67 1997 83
10. P.C. Tiemeijer Inst. Phys. Conf. Ser. 161 1999 191
11. P.C. Tiemeijer Ultramicroscopy 78 1999 53
12. P.C. Tiemeijer, J.H.A. van Lin, and A.F. de Jong Microsc. Microanal. 7 2 2001 1130
13. G. Kothleitner, and F. Hofer Micron 34 2003 211
14. S. Lazar, G.A. Botton, F.T. Tichelaar, M.-Y. Wu, and H. Zandbergen Ultramicroscopy 96 2003 535
15. R.B. Fair Rapid Thermal Processing Science and Technology 1993 Academic Press London
16. S.T. Oyama The Chemistry of Transition Metal Carbides and Nitrides 1996 Blackie Academic & Professional London
17. I. Galesic, and B.O. Kolbesen Thin Solid Films 349 1999 349
18. C. Angelkort, H. Lewalter, A. Berendes, P. Warbichler, F. Hofer, W. Bock, and B.O. Kolbesen Spectrochim. Acta A 57 19 2002 2077
19. A. Berendes, I. Galesic, R. Mertens, W. Bock, H. Oechsner, P. Warbichler, F. Hofer, E. Theodossiu, H. Baumann, and B.O. Kolbesen Z. Anorg. Allg. Chem. 629 2003 1769
20. F. Hofer, P. Warbichler, A. Scott, R. Brydson, I. Galesic, and B. Kolbesen J. Microsc. 204 2 2001 166
21. A.J. Craven J. Microsc. 180 1995 250
22. M. MacKenzie, A.J. Craven, I. Parkin, and A. Nartowski Inst. Phys. Conf. Ser. 153 8 1997 323
23. A.J. Scott, R. Brydson, M. MacKenzie, and A.J. Craven Phys. Rev. B 63 2001 245105
24. C. Mitterbauer, C. Hébert, G. Kothleitner, F. Hofer, P. Schattschneider, and H.W. Zandbergen Solid State Commun. 130 2004 209
25. F. Hofer, W. Grogger, P. Warbichler, and I. Papst Mikrochim. Acta 132 2000 273
26. T. Malis, S.C. Cheng, and R.F. Egerton J. Electron Microsc. Technol. 8 1988 193
27. R.F. Egerton Electron Energy-Loss Spectroscopy in the Electron Microscope 1996 Plenum Press New York
28. D.S. Bright, and R.B. Marinenko Micrsocopy: The Key Research Tool EMSA vol. 22 1992 29
29. M.M. El-Gomati, D.C. Peacock, M. Prutton, and G.H.C. Walker J. Microsc. 147 1987 149
30. P. Blaha, K. Schwarz, J. Luitz: Computercode WIEN97 (Technische Universität Wien, 1997), new version of original code published by P. Blaha, K. Schwarz, P. Sorantin and S.B. Trickey, Comput. Phys. Comm. 59 (1990) 399.
31. R.B. Cattell Multivar. Behav. Res. 1 1966 245 276
32. J.M. Titchmarsh, and S. Dumbill J. Microsc. 184 3 1996 195
33. R.F. Egerton Micron 34 2003 127