Investigation of plasma-induced erosion of multilayer condenser optics

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5751, Issue I, 2005, Pages 128-139

  Anderson, Richard J ^a   Buchenauer, Dean A ^a   Williams, K A ^a   Clift, W M ^a   Klebanoff, L E ^a   Edwards, N V ^b   Wood Ii, O R ^b   Wurm, S ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b SEMATECH   (United States)

Author keywords

Carbon; Erosion; Extreme Ultraviolet Lithography; Gold; Laser Pulsed Plasma Source; Molybdenum; Silicon; Sputtering

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PULSED PLASMA SOURCE; LASER-PRODUCED PLASMA (LPP) SOURCES; XE-SUBSTRATE SPUTTERING;

CARBON; EROSION; GOLD; JETS; LASER BEAMS; MATHEMATICAL MODELS; MOLYBDENUM; PLASMA APPLICATIONS; SILICON; SPUTTERING; XENON;

MULTILAYERS;

EID: 24644443177     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.599859     Document Type: Conference Paper

References (3)

1. "The erosion of materials exposed to a laser produced plasma (LPP) extreme ultraviolet (EUV) illumination source, R. J. Andersen, et al., SPIE Proceedings Vol. 5374, 710-719, 2004.
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3. J. P. Biersack and W. Eckstein, Appl. Phys. A34 (1984) 73.