Dynamic PACVD coating of strip metal with silicon oxide, titanium oxide and amorphous carbon films

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 976-979

  Ortner, K ^a   Jung, T ^a   Klages, C P ^a   Linder, B ^b   Strauss, B ^b   Samann N ^c  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^b VOESTALPINE STAHL GMBH   (Austria)

^c DOC Dortmunder Oberflachencentrum GmbH   (Germany)

Author keywords

High rate deposition; Hollow cathode glow discharge; Optical properties; PACVD; Strip metal coating; Tribological properties

Indexed keywords

AMORPHOUS FILMS; CATHODES; ELASTIC MODULI; GLOW DISCHARGES; HARDNESS; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SILICON COMPOUNDS; STEEL; TITANIUM OXIDES; TRIBOLOGY;

HIGH RATE DEPOSITION; HOLLOW CATHODE GLOW DISCHARGE; STRIP HOLLOW CATHODE (SHC); STRIP METAL COATING; TRIBOLOGICAL PROPERTIES;

PROTECTIVE COATINGS;

COATING; PLASMA TREATMENT; TITANIUM OXIDE; TRIBOLOGY;

EID: 24644441671     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.01.017     Document Type: Article

References (6)

1. T. Jung, C.-P. Klages, German Patent DE 197 44 060 C2.
2. A. Hellmich T. Jung A. Kielhorn M. Rißland Surf. Coat. Technol. 98 1998 1541
3. G. Schäfer K.H. Schoenbach Basic mechanisms contributing to the hollow cathode effect. Physics and applications of pseudosparks 1990 Plenum Press New York 55
4. D. Korzec D. Theirich F. Werner K. Traub J. Engemann Surf. Coat. Technol. 74-75 1995 67
5. D.R. Lide CRC handbook of chemistry and physics 2001 CRC Press Boca Raton
6. W.C. Oliver G.M. Pharr J. Mater. Res. 7 1992 1564