Three-dimensional measurement by tilting & moving objective lens in CD-SEM (III)

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue III, 2005, Pages 1200-1208

  Abe, K ^a   Tsuruga, Y ^a   Okada, S ^a   Noma, T ^a   Aoki, H ^a   Fujii, H ^a   Koike, H ^a   Hamaguchi, A ^b   Yamazaki, Y ^b  

^a TOPCON CORPORATION   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

CD AFM; Electron Optics System; Stereo matching; Three dimensional measurement

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON OPTICS; NONDESTRUCTIVE EXAMINATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES;

CD-AFM; ELECTRON OPTICS SYSTEM; STEREO MATCHING; THREE-DIMENSIONAL (3D) MEASUREMENT;

LENSES;

EID: 24644440515     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600336     Document Type: Conference Paper

References (4)

1. K. Kimura et al., "Three-dimensional measurement by CD-SEM" Proceedings of LSI Testing Symposium 2002, pp207-210 (2002)
2. K. Abe et al., "Three-dimensional measurement by CD-SEM(2)" Proceedings of LSI Testing Symposium 2003, pp43-47 (2003)
3. E. Munro, Optik, Vol.39, pp450-466 (1974)
4. T. Schenk, "Digital Photogrammetry" Research committee of digital photogrammetry, Japan Society of Photogrammetry and Remote Sensing, pp229-234 (2002)