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Volumn 31, Issue 1, 2004, Pages 45-47
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Manufacturing system for gray-scale masks based on the spatial light modulator
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Author keywords
Binary optics; Gray scale mask; Optoelectronics; Spatial light modulator
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Indexed keywords
DIFFRACTION GRATINGS;
LIGHT MODULATORS;
BINARY OPTICS;
BLAZED GRATINGS;
DAMMANN GRATINGS;
FRESNEL LENS;
GRAY SCALE MASKS;
OPTICAL DEVICES;
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EID: 2442650701
PISSN: 02587025
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (9)
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References (9)
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