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Volumn 31, Issue 1, 2004, Pages 45-47

Manufacturing system for gray-scale masks based on the spatial light modulator

Author keywords

Binary optics; Gray scale mask; Optoelectronics; Spatial light modulator

Indexed keywords

DIFFRACTION GRATINGS; LIGHT MODULATORS;

EID: 2442650701     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (9)

References (9)
  • 1
    • 84975577844 scopus 로고
    • Gray-scale masks for diffractive-optics fabrication: I. Commercial slide imagers
    • J. S. Thomas, C. O. Donald. Gray-scale masks for diffractive-optics fabrication: I. Commercial slide imagers [J]. Appl. Opt., 1995, 34(32): 7507-7517
    • (1995) Appl. Opt. , vol.34 , Issue.32 , pp. 7507-7517
    • Thomas, J.S.1    Donald, C.O.2
  • 2
    • 0032649248 scopus 로고    scopus 로고
    • Application of gray-scale LDW-glass masks for fabrication of high-efficiency DOEs
    • V. P. Korolkov, A. I. Malyshev, V. G. Nikitin et al.. Application of gray-scale LDW-glass masks for fabrication of high-efficiency DOEs [C]. SPIE, 1999, 3633: 129-138
    • (1999) SPIE , vol.3633 , pp. 129-138
    • Korolkov, V.P.1    Malyshev, A.I.2    Nikitin, V.G.3
  • 3
    • 0036623456 scopus 로고    scopus 로고
    • Research advances in technology of laser direct writing for binary optical elements
    • Yan Shuhua, Dai Yifan, Lu Haibao et al.. Research advances in technology of laser direct writing for binary optical elements [J]. Semiconductor Optoelectronics, 2002, 23(3): 159-162
    • (2002) Semiconductor Optoelectronics , vol.23 , Issue.3 , pp. 159-162
    • Yan, S.1    Dai, Y.2    Lu, H.3
  • 4
    • 2442716468 scopus 로고    scopus 로고
    • Technique of gray-scale mask
    • Li Hongjun, Li Fengyou, Yu Lin et al.. Technique of gray-scale mask [J]. Micro fabrication Technology, 2000, (1): 10-15
    • (2000) Micro fabrication Technology , Issue.1 , pp. 10-15
    • Li, H.1    Li, F.2    Yu, L.3
  • 5
    • 0011046444 scopus 로고    scopus 로고
    • Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication
    • R. W. Michael, Heng Su. Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication [J]. Appl. Opt., 1998, 37(32): 7568-7576
    • (1998) Appl. Opt. , vol.37 , Issue.32 , pp. 7568-7576
    • Michael, R.W.1    Su, H.2
  • 6
    • 0031389868 scopus 로고    scopus 로고
    • Micro-optic fabrication using one-level gray-tone lithography
    • K. Reimer, H. J. Quenzer, M. Jurss et al.. Micro-optic fabrication using one-level gray-tone lithography [C]. SPIE, 1997, 3008: 279-288
    • (1997) SPIE , vol.3008 , pp. 279-288
    • Reimer, K.1    Quenzer, H.J.2    Jurss, M.3
  • 7
    • 0000938064 scopus 로고
    • Gray-scale masks for diffractive-optics fabrication: II. Spatially filtered halftone screens
    • C. O. Donald, S. R. Willie. Gray-scale masks for diffractive-optics fabrication: II. Spatially filtered halftone screens [J]. Appl. Opt., 1995, 34(32): 7518-7526
    • (1995) Appl. Opt. , vol.34 , Issue.32 , pp. 7518-7526
    • Donald, C.O.1    Willie, S.R.2
  • 8
    • 0004119082 scopus 로고    scopus 로고
    • Beijing: National Defense Industry Press
    • Jin Guofan, Yan Yingbai, Wu Minxian et al.. Binary Optics [M]. Beijing: National Defense Industry Press, 1998. 55-64
    • (1998) Binary Optics , pp. 55-64
    • Jin, G.1    Yan, Y.2    Wu, M.3
  • 9
    • 2442716467 scopus 로고    scopus 로고
    • A high-resolution liquid crystal-on-silicon SXGA projection display
    • H. C. Huang, P. W. Cheng, H. S. Kwok. A high-resolution liquid crystal-on-silicon SXGA projection display [J]. Advanced Display, 2000, (26): 24-32
    • (2000) Advanced Display , Issue.26 , pp. 24-32
    • Huang, H.C.1    Cheng, P.W.2    Kwok, H.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.