Synthesis and characterization of amorphous metallic alloy thin films for MEMS applications

Materials Research Society Symposium - Proceedings

Volumn 806, Issue , 2003, Pages 177-182

  Sambandam, Senthil N ^a   Bhansali, Shekhar ^a   Bhethanabotla, Venkat R ^a  

^a University of South Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION; GRAIN BOUNDARIES; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM ALLOYS;

DEPOSITION PARAMETERS; MULTICOMPONENT SPUTTERING PROCESS; NANOINDENTATION; SURFACE MIGRATION;

AMORPHOUS ALLOYS;

EID: 2442599975     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-806-mm8.1     Document Type: Conference Paper

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