Fabrication and performance of a novel suspended RF spiral inductor

IEEE Transactions on Electron Devices

Volumn 51, Issue 5, 2004, Pages 814-816

  Wang, Xi Ning ^a   Zhao, Xiao Lin ^a   Zhou, Yong ^a   Dai, Xu Han ^a   Cai, Bing Chu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Microelectromechanical systems (MEMS); Radio frequency (RF); Suspended spiral inductor

Indexed keywords

DRY ETCHING; ELECTRIC INDUCTORS; PHOTORESISTS; SEMICONDUCTING GLASS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

Q-FACTOR; SUSPENDED SPIRAL INDUCTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 2442575977     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2004.825822     Document Type: Article

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