Laser-induced chemistry - An advanced tool for micro structuring, synthesis and modification of materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5399, Issue , 2004, Pages 21-26

  Metev, Simeon ^a   Stephen, Andreas ^a   Schwarz, Jörg ^a   Wochnowski, Garsten ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

Laser etching; Laser modification; Plasma CVD

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; LASER BEAM EFFECTS; LASER BEAMS; MICROOPTICS; OPTICAL PROPERTIES; OPTICAL RESOLVING POWER; PHOTONS; RADIATION; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; THIN FILMS;

ANODIC DISSOLUTION; LASER ETCHING; LASER MODIFICATION; THERMAL ACTIVATION;

LASERS;

EID: 2442570695     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.555542     Document Type: Conference Paper

References (13)

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