Development of rapid heating and uniformly pressing system for micro hot embossing

Annual Technical Conference - ANTEC, Conference Proceedings

Volumn 1, Issue , 2004, Pages 942-945

  Chang, Jer Haur ^a   Yang, Sen Yeu ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Far Infrared Radiation; Gas Pressurized Hot Embossing; Hot Embossing; Rapid Heating; Replication

Indexed keywords

HOT AIR HEATING; HOT PRESSING; INFRARED RADIATION; MICROELECTROMECHANICAL DEVICES; PLASTIC FILMS; PLASTIC MOLDS; PRESSURE EFFECTS; ULTRASONIC APPLICATIONS;

FAR INFRARED RADIATION (FIR) HEATING; HOT EMBOSSING; ULTRASONIC HEATING; ULTRASONIC VIBRATIONS;

PLASTICS FORMING;

EID: 2442542106     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Heckele, M., Bacher, W. and Muller, K. D., Hot embossing - the molding technique for plastic microstructures, Microsystem Technologies, 4, 122-124 (1998).
2. Yang, S. Y. and Luo, J. D., Ultrasonic vibration heated hot embossing of plastic plates with microfeatures, Proceeding of 2002 Asia/Australia Regional Meeting of Polymer Processing Society, Taipei, Taiwan (2002).
3. Lee, H. S., Lee, S. K., Kwon, T. H. and Lee, S. S., Birefringence distribution in V-grooved optical parts by hot embossing process, IEEE/LEOS International Conference on Optical MEMS, 135-136 (2002).
4. Grewell, D., Mokhtarzadeh, A., Benatar, A., Lu, C. and Lee, L. J., Feasibility of selected methods for embossing micro-features in thermoplastics, SPE ANTEC Proceedings, 1094 (2003).
5. Chang, J. H. and Yang, S. Y., Gas pressurized hot embossing for transcription of micro-features, Microsystem Technologies, in press (2003).
6. Chang, J. H. and Yang, S. Y., Hot embossing for transcription of micro-features onto large thermoplastic films, Proceedings of The Nineteenth National Conference on The Chinese Society of Mechanical Engineers, YunLin, Taiwan (2002).