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Advanced Materials

Volumn 16, Issue 8, 2004, Pages 706-709

Smooth continuous films of stoichiometric silicon carbide from poly(methylsilyne)

(3) Pitcher, Michael W a Joray, Scott J a Bianconi, Patricia A a

a UNIVERSITY OF MASSACHUSETTS (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRACKS; ELECTRONIC EQUIPMENT; ENERGY DISPERSIVE SPECTROSCOPY; GEL PERMEATION CHROMATOGRAPHY; POLYMERS; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; THIN FILMS;

POLY(METHYLSILYNE); POLYMER FILMS; PRECURSORS; SMOOTH FILMS;

SILICON CARBIDE;

EID: 2442464882 PISSN: 09359648 EISSN: None Source Type: Journal
DOI: 10.1002/adma.200306467 Document Type: Article

Times cited : (25)

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