BEM simulation of laser trimmed hybrid IC resistors

International Journal of Applied Electromagnetics and Mechanics

Volumn 19, Issue 1-4, 2004, Pages 253-256

  Schimmanz, Klaus ^a   Kost, Arnulf ^a  

^a BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Boundary element method; Film resistor design; Laser trimming

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPUTATIONAL METHODS; ELECTROMAGNETISM; INTEGRATED CIRCUITS; LASER BEAM CUTTING; MATHEMATICAL MODELS; PRODUCT DESIGN; SENSITIVITY ANALYSIS;

DIRICHLET EDGE; FILM RESISTOR DESIGN; LASER TRIMMING; SHEET CONDUCTIVITY;

RESISTORS;

EID: 2442432507     PISSN: 13835416     EISSN: None     Source Type: Journal    
DOI: 10.3233/jae-2004-572     Document Type: Conference Paper

References (8)

1. B. Postlethwaite, CAD simulation improve resistor results, Hybrid Circuits, June 1984, 100-105.
2. K. Schimmanz, Konzipieren und Bewerten von Hochpraezisions- Hybridwiderstaenden durch Laser-Trimm-Simulation, Dr.-Ing. Thesis, Berlin, 2002.
3. R. Wagner, Functional laser trimming: an overview, SPIE Vol. 611 Laser Processing of Semiconductors and Hybrids, 1986.
4. C.A. Brebbia, Adaptive finite and boundary element methods, Elsevier Applied Science Southampton, 1993.
5. K. Schimmanz and A. Kost, Formulation and application of mixed elements for the 2D-Boundary Element Method (BEM), 6th International Symposium on Electric and Magnetic Fields (EMF), Aachen, 6-9 October, 2003.
6. K. Schimmanz and A. Kost, Trim Simulations of thin film resistors by the Boundary Element Method (BEM), COMPUMAG Saratoga Springs, NY, USA, 13-17 July, 2003.
7. M.J. Mueller and W. Mickanin, Functional laser trimming of thin film resistors on silicon IC's, SPIE Vol. 611 Laser Processing of Semiconductors and Hybrids, 1986.
8. J. Ramirez-Angulo, et al., Improvement, of laser trimmed film resistor stability by selection of optimal trim paths, IEEE International Symposium on Circuits and Systems, 1991, Vol. 4/5 VLSI Design and CAD, 11-14 June, 1991.