Modified Deal Grove model for the thermal oxidation of silicon carbide

Journal of Applied Physics

Volumn 95, Issue 9, 2004, Pages 4953-4957

  Song, Y ^a   Dhar, S ^a   Feldman, L C ^a   Chung, G ^b   Williams, J R ^c  

^a VANDERBILT UNIVERSITY   (United States)

^b Science and Technology Division   (United States)

^c AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL FACES; INTERFACE REACTIONS; OXIDANTS; THERMAL OXIDATION;

ACTIVATION ENERGY; ANISOTROPY; CARBON; CHEMICAL BONDS; CRYSTALS; DIFFUSION; INTERFACES (MATERIALS); OXIDATION; RATE CONSTANTS; SILICON; SURFACE CHEMISTRY;

SILICON CARBIDE;

EID: 2442428475     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1690097     Document Type: Article

References (18)

1. J. A. Castello and R. E. Tressler, J. Am. Ceram. Soc. 69, 674 (1986).
2. Z. Zheng, R. E. Tressler, and K. E. Spear, J. Electrochem. Soc. 137, 854 (1990).
3. G. H. Schiroky, R. J. Price, and J. E. Sheehan, Rep. No. GA-A18696, GA Technologies Inc., San Diego, CA, 1986.
4. T. Naushima, T. Goto, and T. Hirai, J. Am. Ceram. Soc. 72, 1386 (1989).
5. R. C. A. Harris, J. Am. Ceram. Soc. 58, 7 (1975).
6. E. Fitzer and R. Ebi, in Silicon Carbide 1973, edited by R. C. Marshall, J. W. Faust, Jr., and C. E. Ryan (University of South Carolina Press, Columbia, SC, 1974), p. 320.
7. D. M. Mieskowski, T. E. Mitchell, and A. H. Heuer, J. Am. Ceram. Soc. 67, C17 (1984).
8. W. W. Pultz, J. Phys. Chem. 71, 4556 (1967).
9. N. S. Jacobson, J. Am. Ceram. Soc. 76, 3 (1993).
10. K. L. Luthra, J. Am. Ceram. Soc. 74, 1095 (1991).
11. K. Motzfeld, Acta Chem. Scand. (1947-1973) 18, 1596 (1964).
12. B. E. Deal and A. S. Grove, J. Appl. Phys. 36, 3770 (1965).
13. COis more reasonable. However, this reaction may not a first-order reaction. Otherwise, oxidation behaviors should be the same for the different crystal faces. In order to simplify the model, Eq. (6) is assumed to be correct.
14. S. Dhar et al., Appl. Phys. Lett. 84, 1498 (2004).
15. E. A. Irene, H. Z. Massoud, and E. Tierney, J. Electrochem. Soc. 133, 1253 (1986).
16. Y. Song and F. W. Smith, Appl. Phys. Lett. 81, 3061 (2002).
17. F. J. Norton, Nature (London) 171, 701 (1961).
18. I. Trimaille et al., 16th International Conference on Ion Beam Analysis, June 29-July 4, 2003, Albuquerque, NM.