Synthesis and characterization of new positive photosensitive polyimide having photocleavable 4,5-dimethoxy-2-nitrobenzyl (DMNB) groups

Polymer (Korea)

Volumn 26, Issue 6, 2002, Pages 701-709

  Ok, Ja Choi ^a   Min, Kook Chung ^a   Ryu, Yunmi ^a   Lee, Myong Hoon ^a  

^a Chonbuk National University   (South Korea)

Author keywords

Micro lithography; Photosensitive polymer; Poly imide co (amic ester) ; Polyimides; Positive type

Indexed keywords

EID: 24344508192     PISSN: 0379153X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

1. D.-H. Lee, Polymer(Korea), 11, 206 (1987).
2. N. Yoda and H. Hiramoto, J. Macromol. Sci. Chem., A21, 1641 (1984).
3. R. Rubner, H. Ahne, and E. Kuhn, Photograph. Sci. Eng., 23, 303 (1997).
4. J. Pfeifer and O. Rohde, "Proceedings of Second International Conference on Polyimides : Synthesis, Characterization and Application", p. 130, Marcel Dekker, New York, 1985.
5. A. Reiser, "Photoreactive Polymers - The Science and Technology of Resist", Wiley, New York, 1989.
6. A. Schlitz, IEEE Trans. Component, Hybrides, and Manufacturing Technology, 15, 226 (1992).
7. K. K. Chakravorty, C. P. Chien, and J. M. Cech. IEEE Trans. Components, Hybrides and Manufacturing Technology 13, 200 (1990).
8. R. E. Kerwin and M. R. Goldrick, Polym. Eng. Sci., 11, 426 (1971).
9. M.-H. Lee and Y.-S. Chong, J. Kor. Soc. Imaging Sci. Tech., 5, 34 (1999).
10. M.-H. Lee and Y. Ryu, J. Kor. Soc. Imaging Sci. Tech., 5, 27 (1999).
11. S. Kubota, T. Moriwaki, T. Ando, and A. Fukami, J. Macromol. Sci. Chem., A24, 1497 (1987).
12. S. Kubota, Y. Yamawaki, T. Moriwaki, and S. Eto, Polym. Eng. Sci., 29, 950 (1989).
13. S. Kubota, Y. Tanaka, T. Moriwaki, and S. Eto, J. Electrochem. Soc., 138, 1080 (1991).
14. For review: V. N. R. Pillai, Synthesis, 1980, 1 (1980).
15. J. Park, M. Lee, M.-H.-Lee, J. W. Liu, S. D. Kim, J. Y. Chang, and S. B. Rhee, Macromolecules, 27, 3459 (1994).
16. S. B. Rhee, J. Park, B. S. Moon, M.-H. Lee, and J. Y. Chang, Macromol. Chan. Phys., 196, 691 (1995).
17. M.-H. Lee, J. Park, and S. B. Rhee, Abstract of 36th IUPAC International Symposium on Macromolecules, p. 116, Aug. 4-9, 1996, Seoul, Korea (1996).
18. M.-H. Lee, J. Park, and S. B. Rhee, US Pat. Appl. 08/558,597 (1995). JP Appl. 95-283268 (1995). KP Appl. 94-28242 (1994).
19. J. A. Baltrop, P. J. Plant, and P. Schofield, J. Chem. Soc., Chem. Commun., 22, 823 (1966).