Touch trigger probe measurement accuracy of aspherical mirror during fine lapping process

Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

Volumn 41, Issue 8, 2005, Pages 228-232

  Cheng, Haobo ^a  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Asphere; Fine lapping; Magnetorheological; Polishing; Profile measurement

Indexed keywords

ERROR ANALYSIS; GRINDING (MACHINING); LAPPING; MATRIX ALGEBRA; MIRRORS; POLISHING; PROBES; SURFACE MEASUREMENT;

ASPHERICAL MIRROR; FINE LAPPING; MAGNETORHEOLOGICAL FINISHING; PROFILE MEASUREMENT;

PROFILOMETRY;

EID: 24344455993     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/jme.2005.08.228     Document Type: Article

References (6)

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