Fabrication and characterization of Ba(Ti,Zr)O3 thin films through the chemical solution deposition process

Integrated Ferroelectrics

Volumn 64, Issue , 2004, Pages 227-236

  Tanaka, Kiyotaka ^a   Suzuki, Kazuyuki ^a   Fu, Desheng ^a   Nishizawa, Kaori ^a   Miki, Takeshi ^a   Kato, Kazumi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

2 Step sintering; Ba(Ti1 xZrx)O3; Chemical solution deposition process; Lead free ferroelectrics; Pinching effect; Precipitates; Thin films

Indexed keywords

BARIUM COMPOUNDS; CURRENT VOLTAGE CHARACTERISTICS; HYSTERESIS; LATTICE CONSTANTS; SINTERING; SUBSTITUTION REACTIONS;

2-STEP SINTERING; CHEMICAL SOLUTION DEPOSITION (CSD) PROCESS; LEAD-FREE FERROELECTRICS; PINCHING EFFECT;

THIN FILMS;

EID: 24344439647     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490894500     Document Type: Article

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