Nanocavity shrinkage and preferential amorphization during irradiation in silicon

Chinese Physics Letters

Volumn 22, Issue 3, 2005, Pages 657-660

  Zhu, Xian Fang ^a,b,c   Wang, Zhan Guo ^b  

^a XIAMEN UNIVERSITY   (China)

^b INSTITUTE OF SEMICONDUCTORS   (China)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CONDENSED MATTER PHYSICS; ION BOMBARDMENT; SHRINKAGE;

AMORPHIZATIONS; COVALENTLY BOUND; NANO-CAVITIES; NANOSIZE SCALE; NON-EQUILIBRIUM PROPERTIES; SELF-ION IRRADIATIONS; THERMODYNAMIC NON-EQUILIBRIUM; ULTRA-FAST; VOLUME NANOSTRUCTURES;

AMORPHIZATION;

EID: 24144499124     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/22/3/038     Document Type: Article

References (14)

1. Zhu X F 2000 PhD Thesis Australian National University
2. Zhu X F 2003 J. Phys.: Condensed Matter 15 L253
3. Williams J S, Zhu X F X, Ridgway M C, Conway M J, Williams B C, Fortuna F, Ruault M O and Bernas H 2000 Appl. Phys. Lett. 77 4280
4. Zhu X F, Williams J S, Llewellyn D J and McCallum J C 1999 Appl. Phys. Lett. 74 2313
5. Zhu X F, Williams J S and McCallum J C 1999 Mater. Res. Soc. Symp. Proc. 540 127
6. Zhu X F, Williams J S, Conway M J, Ridgway M C, Rault F, Fortuna F and Bernas H 2001 Appl. Phys. Lett. 79 3416
7. Zhu X F et al (unpublished)
8. Ruault M O, Chaumont J and Bernas H 1983 Nucl. Instrum. Methods 209/210 351
9. Wang H Y et al 2003 Chin. Phys. Lett. 20 1105
10. Williamson D L et al 1995 Appl. Phys. Lett, bf 67 226
11. Volkert C A 1991 J. Appl. Phys. 70 3521
12. Volkert C A 1993 J. Appl. Phys. 74 7107
13. Zhu X F and Wang Z G 2005 Chin. Phys. Lett. 22 737
14. Schmidt M, Kusche R, Issendorff B V and Heberland H 1998 Nature 393 238