Modelling squeeze film effects in a MEMS accelerometer with a levitated proof mass

Journal of Micromechanics and Microengineering

Volumn 15, Issue 5, 2005, Pages 893-902

  Houlihan, Ruth ^a   Kraft, Michael ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; DAMPING; ELECTROSTATICS; FINITE ELEMENT METHOD; HEAT TRANSFER; LEVITATION MELTING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OSCILLATIONS; ROTATION; THIN FILMS;

FINITE-ELEMENT MODELS; MICROMACHINED DISCS; TRIAXIAL ACCELEROMETERS; UNSTABLE SYSTEMS;

ACCELEROMETERS;

EID: 24144486504     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/5/001     Document Type: Article

References (21)

1. Woo S J, Jeon J U, Higuchi T and Jin J 1995 Electrostatic force analysis of electrostatic levitation system Proc. SICE Conf. pp 1347-52
2. Starr J S 1990 Squeeze-film damping in solid-state accelerometer Proc. IEEE Solid-State Sensor and Actuator Workshop pp 44-7
3. Andrews M, Harris I and Turner G 1993 A comparison of squeeze-film theory with measurements on a microstructure Sensors Actuators A 36 79-87
4. Andrews M K and Harris P D 1995 Damping and gas viscosity measurements using a microstructure Sensors Actuators A 49 103-8
5. Yang Y-J and Senturia S D 1996 Numerical simulation of compressible squeezed-film damping Proc. Solid-State Sensor and Actuator Workshop pp 76-9
6. Yang Y-J, Gretillat M-A and Senturia S D 1997 Effect of air damping on the dynamics of nonuniform deformations of microstructures Proc. IEEE Solid-State Sensors, Actuators and Microsystems pp 1093-6
7. Veijola T and Mattila T 2001 Compact squeezed-film damping model for perforated surface Proc. IEEE 11th Int. Conf. on Solid-State Sensors, Actuators and Microsystems pp 1506-9
8. Veijola T, Kuisma H and Lahdenperä J 1998 The influence of gas-surface interaction on gas-film damping in a silicon accelerometer Sensors Actuators A 66 83-92
9. Langlois W E 1962 Isothermal squeeze films Q. Appl. Math. 20 131-50
10. Blech J J 1983 On isothermal squeeze films J. Lubric. Technol. 105 615-20
11. Griffin W S, Richardson H H and Yamanami S 1966 A study of fluid squeeze-film damping ASME J. Basic Eng. 451-6
12. Darling R B, Hivick C and Xu J 1998 Compact analytical modeling of squeeze film damping with arbitrary venting conditions using a green's function approach Sensors Actuators A 70 32-41
13. Sun Y, Chan W K and Liu N 2002 A slip model with molecular dynamics J. Micromech. Microeng. 12 316-22
14. Bao M, Yang H, Sun Y and French P J 2003 Modified Reynolds equation and analytical analysis of squeeze-film air damping of perforated structures J. Micromech. Microeng. 13 795-800
15. Ostergaard D 2003 Using a Heat Transfer Analogy to Solve for Squeeze Film Damping and Stiffness Coefficients in MEMS Structures Online: http://www.ansys.com/industries/mems/mems-downloads/thermal_analogy_damping.pdf
16. Pan F, Kubby J, Peeters E, Tran A and Mukherjee S 1998 Squeeze film damping effect on the dynamic response of a mems torsion mirror J. Micromech. Microeng. 8 200-8
17. Dötzel W, Gessner T, Hahn R, Kaufmann C, Kehr K, Kurth S and Mehner J 1997 Silicon mirrors and micromirror analysis arrays for spatial laser beam modulation Proc. IEEE Solid-State Sensors, Actuators and Microsystems pp 81-4
18. Sharipov F and Seleznev V 1998 Data on internal rarefied gas flows J. Phys. Chem. Ref. Data 27 657-706
19. Greywall D S, Busch A B and Walker J A 1999 Phenomenological model for gas-damping of micromechanical structures Sensors Actuators 72 49-70
20. Houlihan R and Kraft M 2002 Modelling of an accelerometer based on a levitated proof mass J. Micromech. Microeng. 12 495-503
21. Candy J C and Temes G C Oversampling Delta-Sigma Data Converters (Piscataway, NJ: IEEE)