Hands-on classroom photolithography laboratory module to explore nanotechnology

Journal of Chemical Education

Volumn 82, Issue 9, 2005, Pages 1361-1364

  Stelick, Scott J ^a   Alger, William H ^a   Laufer, Jesse S ^a   Waldron, Anna M ^a   Batt, Carl A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT EMITTING DIODES; MASKS; NANOTECHNOLOGY; PHOTORESISTS; STUDENTS; TEACHING;

LABORATORY MODULE; MICROSCALE CIRCUIT FABRICATION; REDUCER SYSTEM;

PHOTOLITHOGRAPHY;

EID: 24144449995     PISSN: 00219584     EISSN: None     Source Type: Journal    
DOI: 10.1021/ed082p1361     Document Type: Article

References (2)

1. Madau, M. T. Lithography. In Fundamental of Microfabrication, 2nd ed.; CRC Press: Boca Raton, FL. 2002.
2. Information of the materials used can be found at http://msds.ehs. cornell.edu/msdssrch.asp (accessed Jun 2005).