A movable mass spectroscopy sampling apparatus for measuring spatial distribution nf neutral radicals in silane plasma

Chinese Physics Letters

Volumn 22, Issue 4, 2005, Pages 904-906

  Wang, Zhao Kui ^a   Lin, Kui Xun ^a   Lin, Xuan Ying ^a   Qiu, Gui Ming ^a   Zhu, Zu Song ^a  

^a SHANTOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MASS SPECTROMETRY;

A-SI:H; DENSITY DISTRIBUTIONS; GAS SAMPLING; MASS SPECTROSCOPY; NEUTRAL RADICAL; PEAK VALUES; POSITION OF ELECTRODES; RADIO FREQUENCY GLOW DISCHARGE; SILANE PLASMAS; SPATIAL DENSITIES;

GLOW DISCHARGES;

EID: 24144432064     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/22/4/035     Document Type: Article

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