Magnetron sputtering growth and characterization of high quality single crystal Ga-doped n-ZnO thin films

Semiconductor Science and Technology

Volumn 20, Issue 9, 2005, Pages

  Kim, Tae Hwan ^a   Jeong, Sang Hun ^b   Kim, Il Soo ^a   Kim, Sang Sub ^a   Lee, Byung Teak ^a  

^a Chonnam National University   (South Korea)

^b Korea Basic Science Institute (KBSI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SEMICONDUCTOR GROWTH; SINGLE CRYSTALS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

FREE ELECTRON DENSITY; RAPID THERMAL PROCESSING; SAPPHIRE SUBSTRATES; SPUTTERING GROWTH;

ZINC OXIDE;

EID: 24044517869     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/20/9/L01     Document Type: Article

References (16)

1. Ko H-J, Yao T, Chen Y and Hong S-K 2002 J. Appl. Phys. 92 4354
2. Ohgaki T, Ohashi N, Kakemoto H, Wada S, Adachi Y, Haneda H and Tsurumi T 2002 J. Appl. Phys. 93 1961
3. Chen Y, Bagnall D M, Koh H-J, Park K-T, Hiraga K, Zhu Z and Yao T 1998 J. Appl. Phys. 84 3912
4. Ogata K, Kawanishi T, Maejima K, Sakurai K, Fujita Sz and Fugita Sg 2002 J. Cryst. Growth 237-239 553
5. Kashiwaba Y, Haga K, Watanabe H, Zhang B P, Segawa Y and Wakatsuki K 2002 Phys. Status Solidi b 229 921
6. Ye J, Gu S, Zhu S, Chen T, Hu L, Qin F, Zhang R, Shi Y and Zheng Y 2002 J. Cryst. Growth 243 151
7. Wang X, Yang S, Wang J, Li M, Jiang X, Du G, Liu X and Chang R P H 2001 J. Cryst. Growth 226 123
8. Pearson W B 1972 Crystal Chemistry and Physics of Metals and Alloys (New York: Wiley) p 76
9. Kato H, Sano M, Miyamoto K and Yao T 2002 J. Cryst. Growth 237-239 538
10. Ko H J, Chen Y F, Hong S K, Wenisch H, Yao T and Look D C 2000 Appl. Phys. Lett. 77 3761
11. Liu Z F, Shan F K, Li Y X, Shin B C and Yu Y S 2003 J. Cryst. Growth 259 130
12. Kim I-S, Jeong S-H, Kim S-S and Lee B-T 2004 Semicond. Sci. Technol. 19 L29-31
13. Jeong S-H, Kim I-S, Kim S-S, Kim J-K and Lee B-T 2004 J. Cryst. Growth 264 110
14. Kim K K, Song J H, Jung H J, Choi W K, Park S J, Song J H and Lee J Y 2000 J. Vac. Sci. Technol. A 18 2864
15. Narayan J, Dovidenko K, Sharma A K and Oktyabrsky S 1998 J. Appl. Phys. 84 2597
16. Shirakata S, Sakemi T, Awai K and Yamamoto T 2003 Thin Solid Films 445 278