Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3150, Issue , 1997, Pages 18-30

  Kleineberg, Ulf ^a   Stock, Hans Juergen ^a   Menke, D ^a   Wehmeyer, O ^a   Heinzmann, Ulrich ^a   Fuchs, Detlef ^b   Bulicke, Peter ^b   Wedowski, Marco ^b   Ulm, Gerhard ^b   Heidemann, Klaus F ^c   Osterried, K ^c  

^a BIELEFELD UNIVERSITY   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^c CARL ZEISS SMT AG   (Germany)

Author keywords

Multilayer gratings; Soft x ray optics

Indexed keywords

DIFFRACTION; DIFFRACTION EFFICIENCY; DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVES; LIGHT; MONOCHROMATORS; SYNCHROTRON RADIATION; SYNCHROTRONS; WINDOWS; X RAY LITHOGRAPHY;

BI-LAYERS; FIRST ORDERS; HIGH EFFICIENCY; INTERFERENCE GRATINGS; LINE DENSITY; MULTILAYER (ML); MULTILAYER DIFFRACTION GRATINGS; MULTILAYER GRATINGS; MULTILAYER MIRROR (MLM); NORMAL INCIDENCE; PHOTON ENERGY RANGE; SOFT X-RAY OPTICS;

MULTILAYERS;

EID: 24044516565     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.283980     Document Type: Conference Paper

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