3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer

Microsystem Technologies

Volumn 11, Issue 2-3, 2005, Pages 168-178

  Park, Jong Yeon ^a,b   Kim, Kun Tae ^b   Shin, Hyun Joon ^b   Moon, Sung ^b   Pak, James Jungho ^a  

^a Korea University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Infrared Detector; Mesh Structure Bonding; Microstructure; PDMS; UV Lithography

Indexed keywords

ANTENNA ARRAYS; BONDING; COMPUTER SIMULATION; ELASTOMERS; INFRARED DETECTORS; LIGHT REFLECTION; LIGHTING; LIQUID CRYSTAL DISPLAYS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MIRRORS; THIN FILM TRANSISTORS;

MESH STRUCTURE BONDING; OPTICAL MICROSTRUCTURE; PDMS; UV-LITHOGRAPHY;

OPTICAL MATERIALS;

EID: 24044479110     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0482-4     Document Type: Article

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