A micro-fuel processor with trench-refilled thick silicon dioxide for thermal isolation fabricated by water-immersion contact photolithography

Journal of Micromechanics and Microengineering

Volumn 15, Issue 9, 2005, Pages

  Chang, Kuei Sung ^a,b   Tanaka, Shuji ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; ENERGY EFFICIENCY; HYDROGEN; METHANOL; PHOTOLITHOGRAPHY; TEMPERATURE DISTRIBUTION; TUNING;

FINE PATTERNS; MICRO-FUEL PROCESSORS; REFORMING CHAMBERS; STEAM REFORMING;

FUEL CELLS;

EID: 23944515375     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/9/S01     Document Type: Article

References (9)

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