SCOPUS 정보 검색 플랫폼

Volumn 29, Issue , 2005, Pages 103-107

An empirical analysis of nitrogen pressure effect on grain size development of nanostructured ternary nitride coatings

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEPOSITION; GRAIN SIZE AND SHAPE; NITRIDES; NITROGEN; SPUTTER DEPOSITION;

COATING STRUCTURE; DEPOSITION PRESSURE; DISCHARGE CONDITIONS; NITRIDE COATINGS;

PRESSURE EFFECTS;

EID: 23944503283 PISSN: 08832900 EISSN: None Source Type: Book Series
DOI: None Document Type: Article

Times cited : (5)

References (14)

1
- 0025636937
- O. Knotek, A. Barimani, B. Bosserhoff and F. Loffler, Thin Solid Films, 193/194 (1990) 557.
- (1990) Thin Solid Films , vol.193-194 , pp. 557
- Knotek, O.¹ Barimani, A.² Bosserhoff, B.³ Loffler, F.⁴

2
- 0026393609
- L. Hultman, G. Hakansson, U. Wahlstrom, J.E. Sundgren, I. Petrov, F. Adibi and J.E. Greene, Thin Solid Films, 205 (1991) 153.
- (1991) Thin Solid Films , vol.205 , pp. 153
- Hultman, L.¹ Hakansson, G.² Wahlstrom, U.³ Sundgren, J.E.⁴ Petrov, I.⁵ Adibi, F.⁶ Greene, J.E.⁷

3
- 3242743427
- O. Knotek, W. Burgmer and C. Stoessel, Surf. Coat. Technol., 54/55 (1992) 249.
- (1992) Surf. Coat. Technol. , vol.54-55 , pp. 249
- Knotek, O.¹ Burgmer, W.² Stoessel, C.³

4
- 0001799516
- U. Wahlstrom, L. Hultman, J.E. Sundgren, F. Adibi, I. Petrov and J.E. Greene, Thin Solid Films, 235 (1993) 62.
- (1993) Thin Solid Films , vol.235 , pp. 62
- Wahlstrom, U.¹ Hultman, L.² Sundgren, J.E.³ Adibi, F.⁴ Petrov, I.⁵ Greene, J.E.⁶

5
- 0027589685
- Y. Tanaka, T.M. Gur, M. Kelly, S.B. Hagstrom and T. Ikeda, Thin Solid Films, 228 (1993) 238.
- (1993) Thin Solid Films , vol.228 , pp. 238
- Tanaka, Y.¹ Gur, T.M.² Kelly, M.³ Hagstrom, S.B.⁴ Ikeda, T.⁵

6
- 0028671115
- O. Knotek, F. Loffler, H.J. Scholl and C. Barimani, Surf. Coat. Technol., 68/69 (1994) 309.
- (1994) Surf. Coat. Technol. , vol.68-69 , pp. 309
- Knotek, O.¹ Loffler, F.² Scholl, H.J.³ Barimani, C.⁴

7
- 0029254828
- B.Y. Shew and J.L. Huang, Surf. Coat. Technol., 71 (1995) 30.
- (1995) Surf. Coat. Technol. , vol.71 , pp. 30
- Shew, B.Y.¹ Huang, J.L.²

8
- 0030401970
- M.R. Phillips and G. McCredie
- R. Wuhrer and W.Y. Yeung, M.R. Phillips and G. McCredie, Thin Solid Films, 290 (1996) 339.
- (1996) Thin Solid Films , vol.290 , pp. 339
- Wuhrer, R.¹ Yeung, W.Y.²

9
- 17144468472
- H.G. Fub, G. Erkens, R. Wenke, T. Cselle and M. Schwenck
- K. Tonshoff, A. Mohlfeld, T. Leyendecker, H.G. Fub, G. Erkens, R. Wenke, T. Cselle and M. Schwenck, Surf. Coat. Technol., 94/95 (1997) 603.
- (1997) Surf. Coat. Technol. , vol.94-95 , pp. 603
- Tonshoff, K.¹ Mohlfeld, A.² Leyendecker, T.³

10
- 0000523689
- J. Vetter, E. Lugscheider and S.S. Guerreiro, Surf. Coat. Technol., 98 (1998) 1233.
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1233
- Vetter, J.¹ Lugscheider, E.² Guerreiro, S.S.³

11
- 0037841864
- R. Wuhrer and W.Y. Yeung, Scripta Mater., 49 (2003) 199.
- (2003) Scripta Mater. , vol.49 , pp. 199
- Wuhrer, R.¹ Yeung, W.Y.²

12
- 0347759934
- R. Wuhrer and W.Y. Yeung, Scripta Mater., 50 (2004) 813.
- (2004) Scripta Mater. , vol.50 , pp. 813
- Wuhrer, R.¹ Yeung, W.Y.²

13
- 0003840273
- McGraw-Hill
- D.L. Smith, Thin Film Deposition: Principles and Practice, McGraw-Hill (1995) p.477.
- (1995) Thin Film Deposition: Principles and Practice , pp. 477
- Smith, D.L.¹

14
- 33645423794
- R. Wuhrer and W.Y. Yeung, J. Aust. Ceram. Soc., 39 (2003) 88.
- (2003) J. Aust. Ceram. Soc. , vol.39 , pp. 88
- Wuhrer, R.¹ Yeung, W.Y.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.