Effect of substrate bias on high quality DLC films deposited by filtered cathode arc plasma

Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals

Volumn 15, Issue 7, 2005, Pages 987-992

  Yan, Peng Xun ^a   Li, Xiao Chun ^a   Li, Chun ^a   Li, Xin ^a   Xu, Jian Wei ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

Hardness; High quality DLC films; Magnetic filtered plasma; Periodic bias

Indexed keywords

EID: 23944465644     PISSN: 10040609     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)