Calculation of diamond chemical vapor deposition region in C-H-O, C-H-O-F and C-S-F phase diagrams

Journal of Wide Bandgap Materials

Volumn 6, Issue 1, 1997, Pages 30-34

  Rakov, E G ^a   Modin, A V ^a   Grunsky, A V ^a  

^a MENDELEEV UNIVERSITY OF CHEMICAL TECHNOLOGY OF RUSSIA   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); FLUORINE COMPOUNDS; HALOGEN COMPOUNDS; HYDROCARBONS;

CHEMICAL EQUILIBRIUM; DEPOSITION REGION BOUNDARIES; DIAMOND CHEMICAL VAPOR DEPOSITION; FLUORINATED HYDROCARBONS;

PHASE DIAGRAMS;

EID: 23844547728     PISSN: 1524511X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Bachmann, P. K., D. Leers and H. Lydtin. 1991. Diamond Relat. Mater., 1:1.
2. Bachmann, P. K., H.-J. Hagemann,H. Lade, et al. 1994. Mater. Res. Soc. Symp. Proc., p. 339
3. Mater. Res. Soc., p. 267.
4. Prijaya, N. A., J. C. Angus and P. K. Bachmann. 1993. Diamond Relat. Mater., 3:129.
5. Rakov, E. G. 1996. Dokladi, Russian Academy of Sciences, in press.
6. Marinelli, M., E. Milani, M. Montouri, et al. 1994. J. Appl. Phys., 76:5702.
7. Marinelli, M., E. Milani, M. Montouri, et al. 1994. Appl. Phys. Lett., 65:2839.
8. Patterson, D. E. et al. 1991. In: "Applications of Diamond Films and Related Materials," Ed., B. Y. Tzeng, E. A. Elsevier, Amsterdam, Netherlands, p. 569.