A study on electrochemical machining method in ultrapure water -electrochemical machining of cathode surface;A study on electrochemical machining method in ultrapure water -electrochemical machining of cathode surface

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 68, Issue 9, 2002, Pages 1241-1245

  Mori, Yuzo ^a   Goto, Hidekazu ^a   Hirose, Kikuji ^a   Kobata, Itsuki ^a   Toma, Yasushi ^a   Nishimura, Taketo ^a  

^a NONE

Author keywords

Catalytic reaction; Cathode, Hydrogen atom; Electrochemical machining; Etching; Hydroxyl ion; Ion exchange material; Silicon, aluminum; Ultrapure water

Indexed keywords

ADSORPTION; ALUMINUM; CATHODES; ELECTROCHEMISTRY; ETCHING; ION EXCHANGE; SILICON; SURFACE CHEMISTRY; WATER;

ELECTROCHEMICAL MACHINING; HYDROXYL ION; ULTRAPURE WATER;

MACHINING;

EID: 23844547535     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.68.1241     Document Type: Article

References (0)