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Volumn 841, Issue , 2005, Pages 345-350
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An investigation of non-linear stress-strain behavior of thin metal films
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
CHARACTERIZATION;
COMPUTER SIMULATION;
ELASTIC MODULI;
FINITE ELEMENT METHOD;
HARDNESS;
INDENTATION;
MICROELECTRONICS;
NEURAL NETWORKS;
STIFFNESS;
STRAIN;
STRENGTH OF MATERIALS;
STRESS ANALYSIS;
THIN FILMS;
ION BEAM MICROSCOPY;
MECHANICAL CHARACTERIZATION;
NANO-MECHANICAL SYSTEMS;
NON-LINEAR STRESS-STRAIN BEHAVIOR;
THIN METAL FILMS;
METALLIC FILMS;
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EID: 23844503924
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (3)
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