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Volumn 83, Issue 32, 2005, Pages 20-23
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Chipmakers get chemical help
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL INDUSTRY;
CHEMICAL VAPOR DEPOSITION;
CONTAMINATION;
DIELECTRIC MATERIALS;
DOPING (ADDITIVES);
ETCHING;
INSULATING MATERIALS;
MICROPROCESSOR CHIPS;
PHOTORESISTORS;
SILICON NITRIDE;
SLURRIES;
THIN FILMS;
VAPORIZATION;
ATOMIC LAYER DEPOSITION (ALD);
CHEMICAL MECHANICAL PLANARIZATION (CMP);
HALOGEN LIGANDS;
SEMICONDUCTOR FABRICATORS;
SEMICONDUCTOR MATERIALS;
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EID: 23844486270
PISSN: 00092347
EISSN: None
Source Type: Trade Journal
DOI: 10.1021/cen-v083n032.p020 Document Type: Review |
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Times cited : (4)
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References (0)
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