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Volumn , Issue , 2004, Pages 313-319
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Behaviors of vacancies in electro-plated Cu films by positron-annihilation lifetime spectroscopy correlated with SIV phenomena
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Author keywords
[No Author keywords available]
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Indexed keywords
ASPECT RATIO;
COPPER;
ELECTRIC CURRENTS;
ELECTROLYTES;
ELECTROPLATING;
GAMMA RAYS;
METALLIC FILMS;
POSITRON ANNIHILATION SPECTROSCOPY;
GAMMA RAY DETECTION;
POSITRON DECAY SPECTRUM;
STRESS-INDUCED VOIDING (SIV);
VACANCY-TYPE DEFECTS;
THIN FILMS;
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EID: 23844467791
PISSN: 15401766
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (6)
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References (5)
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