Photothermal measurements of thermal conductivity of thin amorphous films

Journal of Wide Bandgap Materials

Volumn 5, Issue 4, 1997, Pages 288-297

  Bodzenta, J ^a   Mazur, J ^a   Kleszczewski, Z ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Photothermal measurement; Thermal properties; Thin films

Indexed keywords

FREQUENCY MODULATION; GEOMETRY; HEAT TREATMENT; LASER BEAMS; LEAST SQUARES APPROXIMATIONS; LIGHT INTERFERENCE; NONDESTRUCTIVE EXAMINATION; PROTECTIVE COATINGS; SILICON WAFERS; SUBSTRATES; THERMAL CONDUCTIVITY; THIN FILMS;

COATING LAYERS; HEAT PROPAGATION; PHOTODEFLECTION DETECTION; PHOTOTHERMAL MEASUREMENTS;

AMORPHOUS FILMS;

EID: 23844465990     PISSN: 1524511X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. Graebner, J. E., J. A. Mucha, L. Seibles and G. W. Kamlot. 1992. "The Thermal Conductivity of Chemical-Vapor-Deposited Diamond Films on Silicon," J. Appl. Phys., 71(7):3143-3146.
2. Tokmakoff, A., W. F. Banholzer and M. D. Fayer, 1993. "Thermal Diffusivity Measurements of Natural and Isotopically Enriched Diamond by Picosecond Infrared Transient Grating Experiments," Appl. Phys., A56:87-90.
3. Visser, E. P., E. H. Versteegen and W. J. P. van Enckevort. 1992. "Measurement of Thermal Diffusion in Thin Films Using a Modulated Laser Technique: Application to Chemical-Vapor-Deposited Diamond Films," J. Appl. Phys., 71(7):3238-3248.
4. Chen, Z. and A. Mandelis. 1992. "Thermal-Diffusivity Measurements of Ultrahigh Thermal Conductors with Use of Scanning Photothermal Rate-Window Spectrometry: Chemical-Vapor-Deposition Diamonds," Phys. Rev., B46(20):13526.
5. Petrovsky, A. N., A. O. Salnick, D. O. Mukhin and B. V. Spitsyn. 1992. "Thermal Conductivity Measurements of Synthetic Diamond Films Using the Photothermal Beam Deflection Technique," Mater. Sci. Eng., B11:353-354.
6. Boudina, A., E. Fitzer, U. Netzelmann and H. Reiss. 1993. "Thermal Diffusivity of Diamond Films Synthesized from Methane by Arc Discharge Plasma Jet CVD," Diamond Relat. Mater., 2:852-858.
7. Bachmann, P. K., H. J. Hagemann, H. Lade, D. Leers, D. U. Wiechert, H. Wilson, D. Fournier and K. Plamann. 1995. "Thermal Properties of C/H-, C/H/O-, C/H/N- and C/H/X-Grown Polycrystalline CVD Diamond," Diamond Relat. Mater., 4:820-826.
8. Murphy, J. C. and L. C. Aamodt. 1980. "Photothermal Spectroscopy Using Optical Probing: Mirage Effect," J. Appl. Phys., 51(9):4580-4588.
9. Bodzenta, J., J. Mazur, R. Bukowski and Z. Kleszczewski. 1995. "Photothermal Measurement for Plates," Proc. SPIE, 2643:286-292.
10. Bodzenta, J., J. Mazur, S. Mitura and P. Niedzielski. 1995. "Investigation of DLC Coated Wafers," J. Chem. Vap. Deposit., 3(4):311-323.