Fully depleted monolithic active pixel sensor in SOI technology

IEEE Nuclear Science Symposium Conference Record

Volumn 2, Issue , 2004, Pages 1227-1230

  Kucewicz, W ^a   Bulgheroni, A ^b   Caccia, M ^b   Domanski, K ^c   Grabiec, P ^c   Grodner, M ^c   Jaroszewicz, B ^c   Jastrzab, M ^a   Kociubinski, A ^c   Kucharski, K ^c   Kuta, S ^a   Marczewski, J ^c   Niemiec, H ^a   Sapor, M ^a   Tomaszewski, D ^c  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

^b UNIVERSITY OF INSUBRIA   (Italy)

^c Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; IONIZING RADIATION; MEDICAL IMAGING; RADIATION DETECTORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

BRACHYTHERAPY; PARAMETER EXTRACTION; PIXEL DETECTORS; WAFER-BONDING;

SENSORS;

EID: 23844449422     PISSN: 10957863     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. A. Chediak et al., SIMOX - The "Winner" for 300 mm SOI Wafer Fabrication, Berkeley, University of California, electronic file available at www.mse.berkeley.edu/faculty/sands/MSE125%2520alias/TICS5GRP7.pdf, 2002.
2. M. Cacoia et al., "Silicon Ultra Fast Cameras for Electron and Gamma Sources in Medical Applications'',Nuolear Physics B125 (2003) 133-138
3. M. Amati et al., "Hybrid Active Pixel Sensors and SOI Inspired Option", Nucl. Instr. and Meth. A, vol. 511/1-2, pp. 265-270, 2003.
4. M. Baranski et al., "TSSOI as an Efficient Tool for Diagnostics of SOI Technology in the ET", Proc. Diagnostics & Yield 2003, Warsaw, Poland, 2003.
5. H. Niemiec et al., "Technology Development for Silicon Monolithic Pixel Sensor in SOI Technology", Proceedings of the 10th International Conference MIXDES 2003, Lodz, 2003, pp. 508-511
6. J.D. Berst, "Monolithic Active Pixel Sensors for High Resolution Vertex Detectors". Proc. 6th Workshop on Electronics for LHC Experiments, Krakow, Poland, pp. 535-339, 2000.
7. A. Czermak et al., "Data Acquisition System for Silicon Ultra Fast Cameras for Electron and Gamma Sources in Medical Applications (SUCIMA Imager)", Presented at 8th ICATPP Conference on Astropartiole, Particle, Space Physios, Detectors and Medical Physics Applications, Como, Italy, 2003
8. Eastman Kodak Company, "Shutter Operations for CCD and CMOS Image Sensors". Application Notes, electronic file available at http://www.kodak.com/global/plugins/acrobat/en/digital/ccd/application Notes/ShutterOperations.pdf, 2001.