Near-field enhanced laser-assisted deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5713, Issue , 2005, Pages 464-470

  Shi, J ^a   Lu, Y F ^a   Chen, X Y ^b   Cherukuri, R S ^a   Mendu, K K ^a   Batta, N ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

DLC; Laser assisted deposition; Near field; Tip

Indexed keywords

DIAMOND-LIKE CARBON (DLC); LASER-ASSISTED DEPOSITION; NEAR FIELD; TIP;

CHEMICAL REACTIONS; DEPOSITION; DIAMONDS; ENERGY DISPERSIVE SPECTROSCOPY; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; OXIDATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING;

LASERS;

EID: 23744487071     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.591120     Document Type: Conference Paper

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