Femtosecond versus picosecond laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5713, Issue , 2005, Pages 1-8

  Ostendorf, A ^a   Kamlage, G ^b   Klug, U ^a   Korte, F ^b   Chichkov, B N ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

^b Micreon GmbH   (Germany)

Author keywords

Material processing; Ultrashort laser pulses

Indexed keywords

DRILLING; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); PARAMETER ESTIMATION; SAPPHIRE; SEMICONDUCTOR LASERS; SILICON WAFERS; SOLID STATE LASERS; THERMAL LOAD; TITANIUM; ULTRASHORT PULSES;

MATERIAL PROCESSISNG; PICOSECOND LASER ABLATION; PICOSECOND LASER PULSES; PULSE AMPLIFICATION;

LASER ABLATION;

EID: 23744456607     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.597975     Document Type: Conference Paper

References (10)

1. K. Tamura, H.A. Haus and E.P. Ippen, Self-starting additive pulse mode-locked erbium fiber ring laser, Electron. Lett. 28, 2226-2228 (1992).
2. D. Strickland und G. Mourou, Compression of amplified chirped optical pulses, Opt. Commun. 56, 219-221 (1985).
3. J. Kleinbauer, R. Knappe, R. Wallenstein, A powerful diode-pumped laser source for micro-machining with ps pulses in the infrared, the visible and the ultraviolet, Appl. Phys. B online press first (2004).
4. B.C. Stuart, M.D. Fiet, S. Herman, A.M. Rubenchik, B.W. Shore, and M.D. Perry, Optical ablation by high-power short-pulse lasers, J. Opt. Soc. Am. B 13, 459 (1996).
5. F. Dausinger, Femtosecond technology for precision manufacturing: Fundamental and technical aspects, RIKEN Review No. 50, 77 (2003);
6. D. Breitling, A. Ruf, and F. Dausinger, Fundamental aspects in machining of metals with short and ultrashort laser pulses, Proc. SPIE vol. 5339, 49 (2004).
7. G. Kamlage, T. Bauer, A. Ostendorf, and B.N. Chichkov, Deep drilling of metals by femtosecond laser pulses, Appl. Phys. A 77, 307 (2003).
8. B. Le Drogoff, F. Vidai, S. Laville, M. Chaker, T. Johnston, O. Barthelemy, J. Margot, M. Sabsabi, Laser-ablated volume and depth as a function of pulse duration in aluminum targets. Appl. Opt. 44, 278 (2005).
9. C. Momma, B.N. Chichkov, S. Nolte, F. von Alvensleben, A. Tunnermann, H. Welling, and B. Wellegehausen, Short -pulse laser ablation of solid targets, Opt. Commun. 129, 134 (1996).
10. B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, Femtosecond and picosecond laser microablation: ablation efficiency and laser microplasma expansion, Appl. Phys. A69, S381 (1999).