A new rule-based clustering technique for defect analysis

Microelectronics Journal

Volumn 36, Issue 8, 2005, Pages 718-724

  Shankar, N G ^a   Zhong, Z W ^b  

^a Euro Technology Pte Ltd   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Defect clustering; Manufacturing; Rule based; Semiconductor inspection

Indexed keywords

FUZZY SETS; GRAVITATIONAL EFFECTS; IMAGE PROCESSING; INTEGRATION; MANUFACTURE; PROCESS ENGINEERING; SILICON WAFERS;

CLUSTERING TECHNIQUE; DEFECT CLUSTERING; RULE BASED; SEMICONDUCTOR INSPECTION; WAFER MAPS;

CRYSTAL DEFECTS;

EID: 23744438044     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.02.120     Document Type: Article

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