Aberration correction and its automatic control in scanning electron microscopes

Optik

Volumn 116, Issue 9, 2005, Pages 438-448

  Uno, Shinobu ^a   Honda, Kazuhiro ^a   Nakamura, Natsuko ^a   Matsuya, Miyuki ^a   Zach, Joachim ^b  

^a JEOL LTD   (Japan)

^b CEOS GmbH   (Germany)

Author keywords

Aberration correction; Automatic aberration correction; Deconvolution; Linear feedback control; SEM

Indexed keywords

ABERRATIONS; ANALOG TO DIGITAL CONVERSION; FEEDBACK CONTROL; IMAGE QUALITY; LENSES; LINEAR CONTROL SYSTEMS; SCANNING ELECTRON MICROSCOPY;

ABERRATION CORRECTION; AUTOMATIC ABERRATION CORRECTION; DECONVOLUTION; LINEAR FEEDBACK CONTROL;

ELECTRON MICROSCOPES;

EID: 23444454499     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijleo.2005.03.001     Document Type: Article

References (12)

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