An ECR ion source directly excited in a selected microwave mode cavity resonator for material processing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 237, Issue 1-2, 2005, Pages 262-266

  Asaji, Toyohisa ^a,b,c   Sasaki, Hiroshi ^a   Furuki, Hideyuki ^a   Kato, Yushi ^a   Ishii, Shigeyuki ^a   Kanazawa, Motoichi ^b   Saito, Junji ^b  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

^b Tateyama Machine Co Ltd   (Japan)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

Cavity resonator; Circular microwave mode; ECR; Ion sources; Plasma sources

Indexed keywords

CAVITY RESONATORS; CURRENT DENSITY; ELECTRIC FIELD EFFECTS; ELECTRON CYCLOTRON RESONANCE; MAGNETIC FIELD EFFECTS; MICROWAVE DEVICES; PLASMA SOURCES;

CIRCULAR MICROWAVE MODE; ELECTRIC PROBE; L-SHAPED ANTENNAS; STANDING WAVES;

ION SOURCES;

EID: 23444442268     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.05.001     Document Type: Conference Paper

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