Influence of vacuum annealing on properties of ZnO:Ga films prepared by r.f. magnetron sputtering

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

Volumn 34, Issue 7, 2005, Pages 1166-1168

  Ma, Jin ^a   Yu, Xuhu ^a   Ji, Feng ^a   Wang, Yuheng ^a   Zhang, Xijian ^a   Cheng, Chuanfu ^b   Ma, Honglei ^a  

^a SHANDONG UNIVERSITY   (China)

^b SHANDONG NORMAL UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Vacuum annealing; ZnO:Ga films

Indexed keywords

EID: 23444440617     PISSN: 1002185X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)