Sub-Micron Sized Periodic 3-D Surface Structures Fabricated by Femtosecond UV Laser Pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5063, Issue , 2003, Pages 445-448

  Klein Wiele, Jan Hendrik ^a   Simon, Peter ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

fs ablation; Nano technology; Photonic crystal structures; Sub micron machining

Indexed keywords

ABSORPTION; DIFFRACTION; DIFFRACTION GRATINGS; DYE LASERS; IMAGING TECHNIQUES; INTERFEROMETRY; LASER ABLATION; OPTICAL BEAM SPLITTERS; POLARIZATION; POLYIMIDES; SCANNING ELECTRON MICROSCOPY;

FS ABLATION; NANO-TECHNOLOGY; PHOTONIC CRYSTAL STRUTURES; SUB-MICRON MACHINING;

LASER PULSES;

EID: 2342643496     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.540757     Document Type: Conference Paper

References (5)

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3. T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals," Applied Physics Letters 79, 725-727 (2001).
4. T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, "Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses," Applied Physics Letters 82, 2758-2760 (2003).
5. S. Matsuo, T. Kondo, S. Juodkazis, V. Mizeikis, and H. Misawa, "Fabrication of Three-Dimensional Photonic Crystals by Femtosecond Laser Interference," Proc. SPIE 4655, 327-334 (2002).