Microoptical element on SiN membrane

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5183, Issue , 2003, Pages 61-70

  Chang, J Y ^a   Chang, Y C ^a   Lee, C C ^a   Wang, C M ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Anisotropic etching; Grating; Microoptics; SiN film

Indexed keywords

CHEMICAL VAPOR DEPOSITION; HOLOGRAPHY; LIGHT TRANSMISSION; MICROELECTROMECHANICAL DEVICES; MICROLENSES; OPTICAL FILMS; OPTICAL SYSTEMS; OPTOELECTRONIC DEVICES; SIGNAL PROCESSING; SILICON WAFERS;

ANISOTROPIC ETCHING; FRESNEL LENSES; HOLOGRAPHIC OPTICAL ELEMENTS (HOE);

SILICON NITRIDE;

EID: 2342630012     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.504415     Document Type: Conference Paper

References (4)

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3. Hans P. Herzig, "Micro-Optics Elements, Systems and Applications", 1st ed., Taylor & Francis, London.(1998
4. B. Kress and P. Meyrueis, 2000, "Digital diffractive optics an Introduction to planar diffractive optics and related technology", 1st ed., John Wiley & SONS, LTD, New York.