Enhanced nucleation and post-growth investigations on HFCVD diamond films grown on silicon single crystals pretreated with Zr:diamond mixed slurry

Applied Surface Science

Volumn 229, Issue 1-4, 2004, Pages 254-262

  Dua, A K ^a   Roy, M ^a   Nuwad, J ^a   George, V C ^a   Sawant, S N ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Diamond films; HFCVD; Nucleation; Substrate pretreatment; Zr:diamond mixed slurry

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRAIN BOUNDARIES; HYDROGENATION; LITHOGRAPHY; NUCLEATION; PHOTOLUMINESCENCE; RAMAN SPECTROSCOPY; SILICON; SLURRIES; SURFACE ROUGHNESS; X RAY DIFFRACTION; ZIRCONIUM;

CARBIDE LAYER; ISOPROPYL ALCOHOL; SUBSTRATE PRETREATMENT; ZR:DIAMOND MIXED SLURRY;

DIAMOND FILMS;

EID: 2342612879     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.01.066     Document Type: Article

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