Grating fabrication through X-ray lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5173, Issue , 2003, Pages 108-114

  Mouroulis, Pantazis ^a   Hartley, Frank T ^a   Muller, Richard E ^a   Wilson, Daniel W ^a   Shori, Aidan ^b   Feldman, Martin ^b   Jiang, Li ^b   Christenson, Todd R ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Louisiana State University   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Concentric spectrometers; Convex concave gratings; Grating efficiency; Grating fabrication; X ray lithography

Indexed keywords

COCENTRIC SPECTROMETERS; GRATING EFFICIENCY; GRATING FABRICATION; X-RAY LITHOGRAPHY;

ATOMIC FORCE MICROSCOPY; EFFICIENCY; IMAGE QUALITY; LIGHT TRANSMISSION; LITHOGRAPHY; MASKS; MIRRORS; PHOTOSENSITIVITY; SUBSTRATES; WAVEFRONTS; X RAY ANALYSIS;

DIFFRACTION GRATINGS;

EID: 2342594008     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.503200     Document Type: Conference Paper

References (6)

1. L. Mertz: "Concentric spectrographs," Appl. Opt. 16, 3122-3124 (1977)
2. D. R. Lobb: "Theory of concentric designs for grating spectrometers," Appl. Opt. 33, 2648-2658 (1994)
3. D. Kwo, G. Lawrence, and M. Chrisp: "Design of a grating spectrometer from a 1:1 Offner mirror system," SPIE Proc. 818, 275-279 (1987)
4. P. Mouroulis and M. McKerns: "Pushbroom imaging spectrometer with high spectroscopic data fidelity: experimental demonstration," Opt. Eng. 39, 808-816 (2000)
5. F. Scott: "The production of variable-transmission sinusoidal patterns and other images," Photogr. Sci. & Eng. 9, 86 (1965)
6. P. Mouroulis, F. T. Hartley, D. W. Wilson, V. E. White, A. Shori, S. Nguyen, M. Zhang, and M. Feldman, "Blazed grating fabrication through gray-scale Xray lithography," Opt. Express 11, 270-281 (2003)