Ion beam modification and analysis of metal/polymer bi-layer thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 798-803

  Wang, Y Q ^a,e   Curry, M ^b   Tavenner, E ^c   Dobson, N ^d   Giedd, R E ^b  

^a UNIVERSITY OF MINNESOTA   (United States)

^b MISSOURI STATE UNIVERSITY   (United States)

^c UNIVERSITY OF QUEENSLAND   (Australia)

^d BREWER SCIENCE INC   (United States)

^e LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Electrical conductivity; Ion Implantation; Metal polymer interface; Microstructure; RBS ERD; SEM

Indexed keywords

DIFFUSION; ELECTRIC CONDUCTIVITY; GOLD ALLOYS; INTERFACES (MATERIALS); ION IMPLANTATION; MICROSTRUCTURE; MIXING; PERCOLATION (SOLID STATE); POLYMERS; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

ELECTRICAL PERFORMANCE; FILM THICKNESS; METAL/POLYMER INTERFACE; RBS/ERD;

ION BEAMS;

EID: 2342568944     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.166     Document Type: Conference Paper

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